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Comparison of Electron Transmittances and Tunneling Currents in an Anisotropic TiNx/HfO2/SiO2/p-Si(100) Metal-Oxide-Semiconductor (MOS) Capacitor Calculated Using Exponential- and Airy-Wavefunction Approaches and a Transfer Matrix Method
Authors:Fatimah A. Noor  Mikrajuddin Abdullah  Sukirno  Khairurrijal
Affiliation:Physics of Electronic Materials Research Division, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jalan Ganesa 10, Bandung 40132, Indonesia;Physics of Electronic Materials Research Division, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jalan Ganesa 10, Bandung 40132, Indonesia;Physics of Electronic Materials Research Division, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jalan Ganesa 10, Bandung 40132, Indonesia;Physics of Electronic Materials Research Division, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jalan Ganesa 10, Bandung 40132, Indonesia
Abstract:
Keywords:Airy wavefunction  anisotropic MOS  exponential wavefunction  transfer matrix method  transmittance  tunneling current
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