| 金属氧化物半导体气敏传感器 |
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| 引用本文： | 傅盼盼,杨志学.金属氧化物半导体气敏传感器[J].化工时刊,2013,27(3):45-47. |
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| 作者姓名： | 傅盼盼 杨志学 |
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| 作者单位： | 浙江工业大学化学工程与材料学院,浙江杭州,310014 |
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| 摘 要： | 主要介绍半导体气敏传感器的类型，金属氧化物半导体气敏传感器气敏原理和特性参数，了解贵金属的掺杂效应，即通过添加贵金属的方法，改善传感器的灵敏度和选择性，综述了金属氧化物半导体气敏传感器添加贵金属改性的研究进展。
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| 关 键 词： | 气敏机理 特性参数 贵金属 |
Metal Oxide Semiconductor Gas Sensor |
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| Fu Panpan
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Yang Zhixue.Metal Oxide Semiconductor Gas Sensor[J].Chemical Industry Times,2013,27(3):45-47. |
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| Authors: | Fu Panpan Yang Zhixue |
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| Affiliation: | Fu Panpan Yang Zhixue(College of Chemical Engineering and Materials Science,Zhejiang University of Technology,Zhejiang Hangzhou 310014) |
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| Abstract: | The types of semiconductor gas sensors, the gas sensing mechanism and Characteristic parameters of metal oxide semiconductor gas sensor were introduced. The precious metal doping effects were described. The sensi- tivity and selectivity of the sensor were improved by adding precious metals. The research progress of modify metal ox- ide semiconductor gas sensor by adding precious metals was summaried. |
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| Keywords: | gas sensing mechanism characteristic parameters precious metals |
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