| 液相外延生长Hg_（1－x）Cd_xTe薄膜及其特性分析 |
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| 引用本文： | 李标,陈新强,褚君浩,曹菊英,汤定元.液相外延生长Hg_（1－x）Cd_xTe薄膜及其特性分析[J].红外与毫米波学报,1995,14(3). |
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| 作者姓名： | 李标 陈新强 褚君浩 曹菊英 汤定元 |
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| 作者单位： | 中国科学院上海技术物理研究所红外物理国家重点实验室 |
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| 摘 要： | 报道了用液相外延技术生长Ｈｇ１－ｘＣｄｘＴｅ薄膜的工艺及分析薄膜特性的方法．结果表明Ｈｇ气压、过冷度、降温速率及退人条件等因素对波相外延薄膜的性能有很大影响．由Ｘ射线双晶回摆曲线可定量分析点阵失配度及外延层的组份，由红外透射光谱确定外延层组份的纵向分布．
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| 关 键 词： | 液相外延，Hg1－xCdxTe，X射线双晶衍射，红外透射光谱 |
GROWTH AND CHARACTERIZATION OF Hg_(1-x)Cd_x Te LPE FILMS |
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| Li Biao,Cheng Xinqiang,Chu Junhao,Chao Juying,Tang Dingyuan.GROWTH AND CHARACTERIZATION OF Hg_(1-x)Cd_x Te LPE FILMS[J].Journal of Infrared and Millimeter Waves,1995,14(3). |
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| Authors: | Li Biao Cheng Xinqiang Chu Junhao Chao Juying Tang Dingyuan |
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| Abstract: | The liquid phase epitaxy (LPE) growth of Hg1-xCdxTe from Te-rich solution in a vertical dipping reactor system is reported.X-ray double-crystal diffraction and IR transmittance spectra were used for the characterization of the quality of epilayers.It is seen that the Hg vapor pressure,degree of supercooling,cooling rate and annealing condition affect the properties of grown layers.The degree of mismatch and the x-value of epilayer can be derived quantitatively from the X-ray rocking curve,while the longitudinal composition profile of the epilayer is determined from the room temperature infrared transmission. |
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| Keywords: | liquid phase epitaxy Hg1-xCdxTe X-ray double-crystal diffraction infrared transmitance spectrum |
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