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压电微马达研究进展
引用本文:阎立,褚祥诚,董蜀湘,李龙土. 压电微马达研究进展[J]. 压电与声光, 2002, 24(2): 116-121
作者姓名:阎立  褚祥诚  董蜀湘  李龙土
作者单位:清华大学材料科学与工程系,新型陶瓷与精细工艺国家重点实验室,北京,100084
摘    要:利用网络和图书馆对国际上1996年至今的压电微马达研究进展进行了调研。分别介绍了压电薄膜陶瓷的行波、驻波类微马达的最新研究情况,同时也对一种具有与压电微马达特性相同的静电超声微马达的研究作了说明,最后给出了本实验室研制的压电陶瓷行波微马达的运动机理。

关 键 词:压电微马达 压电薄膜 静电超声微马达
文章编号:1004-2474(2002)02-0116-06
修稿时间:2001-05-07

Reserch and Development of the Piezoelectric Micromotor
YAN Li,CHU Xiang cheng,DONG Shu xiang,LI Long tu. Reserch and Development of the Piezoelectric Micromotor[J]. Piezoelectrics & Acoustooptics, 2002, 24(2): 116-121
Authors:YAN Li  CHU Xiang cheng  DONG Shu xiang  LI Long tu
Abstract:In order to obtain the development of piezoelectric micromotors in the world recently,I have searched the papers and researches on the topics of the piezoelectric micromotors published since 1996 with the internet tools and library.This paper reviews the novel researches on the piezoelectric film and ceramic block micromotors using traveling and standing wave,and also introduce the electrostatic micromotor with the same characteristics as piezoelectric motors.At the end the principle of the piezoelectric ceramic traveling wave micromotor in our lab will be presented.
Keywords:micromotor  micro actuator  piezoelectric ceramic  ultrasonic motor
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