| 掺Sb-CdTe薄膜的结构及其光学特性研究 |
| |
| 引用本文： | 李蓉萍,李琦. 掺Sb-CdTe薄膜的结构及其光学特性研究[J]. 真空科学与技术学报, 2002, 22(6): 474-476 |
| |
| 作者姓名： | 李蓉萍 李琦 |
| |
| 作者单位： | 内蒙古大学理工学院物理系,呼和浩特,010021 |
| |
| 基金项目： | 内蒙古自治区自然科学基金资助项目 (9713 0 1 3 ) |
| |
| 摘 要： | 用真空蒸发技术在玻璃衬底上获得了掺杂Sb的CdTe薄膜 ,薄膜为立方晶系结构 ,具有沿 [111]晶向的择优取向。薄膜为p型呈高阻状态 ,在可见光范围内透过率很低。研究了不同掺杂浓度下薄膜的性质 ,并在不同条件下对薄膜进行热处理 ,研究了热处理对薄膜的影响
|
| 关 键 词： | Sb-CdTe薄膜 真空蒸发 热处理 |
| 文章编号： | 0253-9748(2002)06-0474-03 |
| 修稿时间： | 2002-09-13 |
Properties of Sb-doped CdTe Thin Flims |
| |
| Li Rongping,Li Qi. Properties of Sb-doped CdTe Thin Flims[J]. JOurnal of Vacuum Science and Technology, 2002, 22(6): 474-476 |
| |
| Authors: | Li Rongping Li Qi |
| |
| Abstract: | Sb doped CdTe thin film was grown by vacuum deposition on glass substrate.The microstructures of the film was studied with X ray diffraction spectroscopy(XRD).The film has a cubic crystal structure with a preferential growth orientation along CdTe plane.Its electrical and optical properties were also studied.The results show that the p type film has a higher resistivity and a lower transmission in the wisible spectral range.Influence of annealing on the film properties under different annealing conditions was discussed. |
| |
| Keywords: | Sb CdTe thin film Vacuum deposition Annealing |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
