| 碳纳米管/金属接触改善方法的研究进展 |
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| 引用本文： | 陈长鑫,金铁凝,张亚非.碳纳米管/金属接触改善方法的研究进展[J].无机材料学报,2012,27(5):449-457. |
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| 作者姓名： | 陈长鑫 金铁凝 张亚非 |
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| 作者单位： | (上海交通大学 微纳科学技术研究院, 薄膜和微细技术教育部重点实验室, 微米纳米加工技术国家级重点实验室, 上海 200240) |
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| 基金项目： | 上海市青年科技启明星计划(10QA1403500);全国优秀博士学位论文作者专项基金(201154);高等学校博士学科点专项科研基金(200802481028);韩国三星(Samsung)技术院全球研究拓展(GRO)计划项目;“晨星学者奖励计划”SMC优秀青年教师项目(SMC2009GB16)~~ |
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| 摘 要： | 碳纳米管(CNT)由于其独特结构和优异特性已被广泛用来构筑各种纳米器件. 而CNT与电极间的接触在CNT器件中扮演着重要的作用, 是器件性能的关键影响因素. 采用何种有效的方法来改善CNT与金属电极间的接触一直是CNT器件研究中的一个重要方面. 本文综述了近年来CNT/金属接触改善方法的研究进展, 结合本课题组的研究对目前有代表性的接触改善方法进行介绍. 阐述了各种改善方法的原理和加工工艺, 讨论了采用这些方法获得的接触特性和器件性能, 并对各方法的特点进行了比较.
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| 关 键 词： | 碳纳米管(CNT) 碳纳米管/金属接触 接触电阻 碳纳米管场效应晶体管(CNTFET) 综述 |
| 收稿时间： | 2011-09-12 |
| 修稿时间： | 2011-11-29 |
Progress in Improvement Methods of Carbon Nanotube/Metal Contact |
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| CHEN Chang-Xin,JIN Tie-Ning,ZHANG Ya-Fei.Progress in Improvement Methods of Carbon Nanotube/Metal Contact[J].Journal of Inorganic Materials,2012,27(5):449-457. |
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| Authors: | CHEN Chang-Xin JIN Tie-Ning ZHANG Ya-Fei |
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| Affiliation: | (Key Laboratory for Thin Film and Micro-fabrication of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and Thecnology, Shanghai Jiao Tong University, Shanghai 200240, China) |
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| Abstract: | Owing to its unique structure and excellent properties,carbon nanotube(CNT) has been widely used to construct various nanodevices.The contact between CNTs and metal electrodes plays a key role in CNT-based devices and directly influences device performance.Therefore,the improvement of the CNT/electrode contact is an important aspect in the study of CNT devices.In this paper,recent research progress on the improvement methods of the CNT/metal contact is reviewed.Typical contact optimization methods and their principles and processes are introduced.The resulting contact characteristics and device performances by applying these improvement methods are also discussed.On this basis,the features of these different improvement methods are compared. |
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| Keywords: | carbon nanotube(CNT) carbon nanotube/metal contact contact resistance carbon nanotube field-effect transistor(CNTFET) review |
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