PVD法制备TiN/AlTiN涂层的摩擦与磨损性能

采用物理气相沉积法在Cr12MoV钢基体上沉积TiN和AlTiN涂层，用扫描电镜、X射线衍射仪和划痕仪分析了涂层表面与界面形貌、物相和结合强度，并进行了摩擦与磨损试验。结果表明，TiN和AlTiN涂层具有较高硬度，AlTiN涂层表面粗糙度优于TiN涂层，TiN涂层表面轮廓算术平均偏差Ra为328.91nm，AlTiN表面轮廓算术平均偏差Ra为112.49nm；TiN涂层结合强度为28.85N，而AlTiN涂层结合强度为27.35N；AlTiN摩擦因数在磨合期和波动期略高于TiN涂层，在稳定期摩擦因数基本接近，维持在0.44-0.46左右；AlTiN涂层韧性比TiN涂层有一定的提高，其磨损性能优于TiN涂层。

Friction and Wear Properties of TiN/AlTiN Coatings Prepared by PVD

The TiN and AlTiN coatings were prepared on Cr12MoV steel substrate by physical vapor deposition (PVD) method, the morphologies, phase and bonding strength of the coating surface and interface were analyzed by SEM, XRD and scratching tester respectively, and the friction-wear test of the coating was processed. The results show that TiN and AlTiN coatings have higher hardness, the surface roughness of the AlTiN coating is better than that of the TiN coating, the average deviation of the surface profile arithmetic Ra of TiN coating is 328.91nm, while that of AlTiN coating is 112.49nm. Binding strength of TiN coating is 28.8N, and that of AlTiN coating is only 15.05N. Friction coefficient of AlTiN coating slightly higher than that of TiN coating in running-in period and fluctuation period, and friction coefficients of the two coatings are almost same in the stable period, which maintains at about 0.44-0.46. Compared with TiN coating, toughness of AlTiN coating has improved than that of TiN coating, and its wear performance is better than that of TiN coating.