压电型微固体模态陀螺的模态及谐振分析

压电型微固体模态陀螺利用压电体的特殊振动模态来工作,它是一种不同于微振动陀螺的全固态微陀螺.在压电型微固体模态陀螺中不存在整体运动的部件和弹性支撑结构,因此抗冲击、抗震动能力强.同时,它对真空封装没有特殊的要求,因此稳定性好,长期工作可靠性高.文中详细介绍了压电型微固体模态陀螺的工作机理,建立了该种新型微陀螺的结构模型,并对压电块的振动模态和自激谐振进行了有限元分析,获得了满足要求的工作振动模态.通过谐振分析,进一步验证了提出的结构模型的有效性.本文为压电型微固体模态陀螺的制作提供了理论依据.

Modal and Harmonic Analysis of Piezoelectric Solid-state Micromachined Modal Gyroscope (PSMMG)

A novel kind of MEMS micro-gyroscope, piezoelectric solid-state micromachined modal gyroscope (PSMMG) is introduced in the paper. PSMMG works with the special vibratory mode, and it is a kind of solid-state micro-gyroscope, which is different from micromachined vibrated gyroscope. There is no moving part and suspended structure in PSMMG, so it has higher resistance to shock and shake. PSMMG has no special requirement on vacuum package, so it has higher stability and reliability. The working mechanism of PSMMG is introduced in the paper. The model of PSMMG is given in the paper, and using finite element method, the modal and harmonic analysis are conducted. Through modal analysis, the working vibratory mode of piezoelectric body is gained. The harmonic analysis validated the structure model of PSMMG. The work of the paper provides theory foundation for fabricating PSMMG.