利用微运动分析仪研究MEMS器件的运动特性

介绍了一种计算机控制的微运动分析仪（MMA），用来研究微机电系统（MEMS）中可动部件的运动特性。它采用了2种光学无损测量方法：计算机微视觉方法用于面内运动测量；相移干涉方法用于离面运动测量。这个高度集成的系统包括了高性能成像系统、驱动电路、数据采集和分析软件。MMA利用频闪照明方法冻结器件的快速运动，可以测量1Hz～10MHz频率的三维运动特性，达到了nm级分辨力。通过研究一个微加工多晶硅微谐振器的运动特性来说明MMA的强大功能。

Micro-motion Analyzer Used to Dynamic Behavior of MEMS Devices

A computer-controlled micro-motion analyzer(MMA) to study the dynamic behavior of movable structures of microelectromech-anical systems(MEMS) is introduced.It employs two optical nondestructive methods:computer microvision for in-plane motion measurement and phase-shifting interferometry for out-of-plane motion mesasurement.This fully integrated system includes a high performance imaging system,drive electronics,data acquisition and analysis software.This system can freeze the fast motions of MEMS devices by using strobed illumination,and it can measure the motions in 3-dimensions at frequencies from 1 Hz to 10 MHz with nanometer resolution.The capabilities of this system are illustrated with a study of the dynamic behavior of a surface micromachined polysilicon micro-resonator.