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Reflection X-ray topography of ZnO thin films on non-orienting substrates
Authors:A. Misuik
Affiliation:Institute of Electron Technology, Technical University of Wroc?aw, 50-370 Wroc?aw, Poland
Abstract:Thin or moderately thick polycrystalline films of ZnO with preferentially oriented crystallites deposited on non-orienting substrates can in some cases be investigated using conventional X-ray topography. Examples of such reflection topographs are presented and their characteristic features are discussed. In particular, it is often possible to observe the texture, the film inhomogeneity and the influence of the deposition conditions on the preferred orientation.
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