| The Gas Nucleation Process Study of Anatase TiO2 in Atmospheric Non-Thermal Plasma EnhancedChemical Vapor Deposition简 |
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| 引用本文： | 吴茂水,徐雨,戴林君,王恬恬,李雪,王德信,郭颖,丁可,黄晓江,石建军,张菁.The Gas Nucleation Process Study of Anatase TiO2 in Atmospheric Non-Thermal Plasma EnhancedChemical Vapor Deposition简[J].等离子体科学和技术,2014(1):32-36. |
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| 作者姓名： | 吴茂水 徐雨 戴林君 王恬恬 李雪 王德信 郭颖 丁可 黄晓江 石建军 张菁 |
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| 基金项目： | supported by National Natural Science Foundation of China(Nos.10835004,10775031 and 11375042);Shanghai Municipal Committee of Science and Technology of China(10XD1400100);Outstanding Young Investigator Award(No.11005017) |
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| 摘 要： | Abstract The gas phase nucleation process of anatase TiO2 in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at different power density were collected outside of the reactor. The structure of the collected particles has been investigated by field scanning electron microscope （FESEM）, X-ray diffraction （XRD）, high resolution transmission electron microscopy （HRTEM） and selected area electron diffraction （SAED）. The analysis shows that uniform crystalline nuclei with average size of several nanometers have been formed in the scale of micro second through this reactive atmo- spheric plasma gas process. The crystallinity of the nanoparticles increases with power density. The high density of crystalline nanonuclei in the plasma gas phase and the low gas temperature are beneficial to the fast deposition of the 3D porous anatase TiO2 film.
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| 关 键 词： | 等离子体化学气相沉积 非热等离子体 等离子气体 锐钛矿型 成核过程 TiO2 大气 高分辨透射电子显微镜 |
The Gas Nucleation Process Study of Anatase TiO_2 in Atmospheric Non-Thermal Plasma Enhanced Chemical Vapor Deposition |
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| Abstract: | gas phase nucleation, TiO2 nanoparticles, plasma enhanced chemical vapordeposition （PECVD）, 3D nanostructured films, atmospheric pressure |
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| Keywords: | gas phase nucleation TiO nanoparticles plasma enhanced chemical vapor deposition(PECVD) D nanostructured films atmospheric pressure |
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