| Deposition of Polymer Thin Film Using an Atmospheric Pressure Micro-Plasma Driven by Dual-FrequencyExcitation简 |
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| 引用本文： | 王晓敏,袁强华,周永杰,殷桂琴,董晨钟. Deposition of Polymer Thin Film Using an Atmospheric Pressure Micro-Plasma Driven by Dual-FrequencyExcitation简[J]. 等离子体科学和技术, 2014, 0(1): 68-72 |
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| 作者姓名： | 王晓敏 袁强华 周永杰 殷桂琴 董晨钟 |
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| 基金项目： | supported by National Natural Science Foundation of China(No.11165012);China Postdoctoral Science Foundation Funded Project(2011M501494,2012T50831);Project of Key Laboratory of Atomic and Molecular Physics&Functional Materials of Gansu Province,Project of Northwest Normal University(NWNU-LKQN-11-9) |
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| 摘 要： | Polymer thin film deposition using an atmospheric pressure micro-plasma jet driven by dual-frequency excitations is described in this paper. The discharge process was operated with a mixture of argon （6 slm） and a small amount of acetone （0-2100 ppm）. Plasma composition was measured by optical emission spectroscopy （OES）. In addition to a large number of Ar spectra lines, we observed some spectra of C, CN, CH and C2. Through changing acetone content mixed in argon, we found that the optimum discharge condition for deposition can be characterized by the maximum concentration of carbonaceous species. The deposited film was characterized by scanning electron microscopy （SEM） and X-ray photoelectron spectroscopy （XPS） and Fourier transform infrared （FTIR） spectroscopy. The XPS indicated that the film was mostly composed of C with trace amount of O and N elements. The FTIR suggested different carbon-containing bonds （-CHx, C=O, C=C, C-O-C） presented in the deposited film.
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| 关 键 词： | 聚合物薄膜 微等离子体 薄膜沉积 大气压力 双频励磁 傅里叶变换红外光谱 X射线光电子能谱 扫描电子显微镜 |
Deposition of Polymer Thin Film Using an Atmospheric Pressure Micro-Plasma Driven by Dual-Frequency Excitation |
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| Abstract: | atmospheric pressure plasma, dual-frequency excitation, polymer thin film |
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| Keywords: | atmospheric pressure plasma dual-frequency excitation polymer thin film |
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