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Fabrication of channel optical waveguide using CO2 laser |
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| Authors: | Terui Hiroshi Kobayashi Morio |
| Affiliation: | NTT Ibaraki Electrical Communication Laboratory, Tokai, Japan; |
| Abstract: | A CO2-laser-irradiated SiO2-Ta2O5 optical-film waveguide has been found to produce up to 2% refractive-index decrease. The usefulness of the CO2 technique has been demonstrated by fabricating a curved multimode channel waveguide with 1 dB/cm propagation loss in the thin film. |
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