Writing an arbitrary non-periodic pattern using interference lithography |
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| Authors: | S. Pau G. P. Watson O. Nalamasu |
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| Affiliation: | Bell Labs , Lucent Technologies , 600 Mountain Avenue, Murray Hill, NJ, 07974, USA E-mail: stanpau@physics.lucent.com |
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| Abstract: | Abstract We propose a technique to write non-periodic patterns using interference lithography. Arbitrary patterns in one and two dimension are constructed by continuous scanning of multiple coherent sources at various incident angles and intensities. |
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