Replicated arrays of hybrid elements for application in a low-cost micro-spectrometer array |
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| Authors: | S Traut M Rossi H P Herzig |
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| Affiliation: | 1. Institute of Microtechnology, University of Neuch[acaron]tel , Rue A. L. Breguet 2, 2000, Neuch[acaron]tel, Switzerland;2. Centre Suisse d'Electronique et de Microtechnique CSEM , Badenerstrasse 569, 8048, Zürich, Switzerland |
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| Abstract: | Abstract We report on the fabrication and characterization of replicated hybrid elements for low-cost micro-spectrometer array applications. An array of hybrid elements, where one surface combines the fairly large dimensions of refractive microlenses with the submicron features of a diffraction grating, was successfully replicated by hot embossing. The parameters are: lens diameter=990 μm, height=60 μm, grating period=1 μm, linewidth=300 nm and grating depth=2 μm. These replicated spectrometer elements showed a maximum resolution of 2.25 nm and a stray-light suppression better than 30 dB. |
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