Study of sub-aperture stitching interferometry based on topography data |
| |
| Authors: | Zixin Zhao Hong Zhao Fen Gao Hubing Du |
| |
| Affiliation: | 1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi, P.R. China.zhaohong@mail.xjtu.edu.cn;3. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi, P.R. China.;4. School of Optoelectronic Engineering, Xi’an Technological University, Xi’an, P.R. China.;5. School of Mechatronic Engineering, Xi’an Technological University, Xi’an, Shaanxi, P.R. China. |
| |
| Abstract: | Sub-aperture stitching testing method is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. In this paper, the global stitching method based on topography data is studied. The influence of the weight coefficient and the positioning accuracy on the stitching result is investigated. On this basis, the lateral parameters optimization method is introduced. Finally, a 152.4 mm parabolic surface is tested to validate the effectiveness of the proposed method. |
| |
| Keywords: | sub-aperture stitching interferometry topography data lateral parameters optimization |
|
|
