Accurate Linewidth Measurements in Aperture Limited In-line Fraunhofer Holography |
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| Authors: | Chandra S. Vikram |
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| Affiliation: | Center for Applied Optics , The University of Alabama in Huntsville , Huntsville, Alabama, 35899, U.S.A. |
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| Abstract: | Abstract Methods for accurate width analysis of line objects in aperture limited in-line Fraunhofer holography are described. One approach involves size correction utilizing the nature of the error commonly introduced. The other technique used involves measuring the width at a certain normalized intensity and not at the apparent edge. The general background is discussed in detail using an opaque object model. |
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