An algorithm for profilometry by white-light phase-shifting interferometry

Abstract

In the case of white-light interferometry, the usual phase shifting methods cannot be used because the modulation in the interference intensity is due to both the phase variation and to the coherence envelope. We propose a practical approach in which the coherence envelope is considered as locally linear. The classical four-point calculation algorithm is adapted to a set of seven intensities which are weighted with adapted coefficients in order to compensate for the effect of the coherence envelope. The capabilities of this method are described theoretically.