首页 | 本学科首页   官方微博 | 高级检索  
     


Diffractive shaping of excimer laser beams
Authors:J. Turunen  P. Pääkkönen  M. Kuittinen  P. Laakkonen  J. Simonen  T. Kajava
Affiliation:1. University of Joensuu, Department of Physics , P.O. Box 11 1, FIN-80101, Joensuu, Finland;2. elsinki University of Technology, Department of Engineering, Physics and Mathematics , P.O. Box 2200, FIN-02015, HUT, Espoo, Finland
Abstract:Abstract

We address the problem of shaping the intensity distribution of a highly directional partially coherent field, such as an excimer laser beam, by means of diffractive optics. Our theoretical analysis is based on modelling the multi-transverse-mode laser beam as a Gaussian Schell-model beam. It is shown numerically that a periodic element, which is unsuitable for the shaping of a coherent laser beam, works well with an excimer laser beam because of its partial spatial coherence. The conversion of an approximately Gaussian excimer laser beam into a flat-top beam in the Fourier plane of a lens is demonstrated with a diffractive beam shaper fabricated as a multilevel profile in SiOl by electron-beam lithography and proportional reactive-ion etching.
Keywords:
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号