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An interference method for measuring parallelism of miniature optical components |
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| Authors: | Meruzhan Kerobyan Anna Gyulasaryan Suren Soghomonyan Gevorg Gabrielyan Stepan Essaian |
| Affiliation: | 1. Spectralus CJSC , Hr. Nersisyan 10a, 0069, Yerevan , Armenia kerobyan.mk@gmail.com;3. Spectralus CJSC , Hr. Nersisyan 10a, 0069, Yerevan , Armenia;4. Spectralus Corporation , 2953 Bunker Hill Lane, Suite 205, Santa Clara , CA , 95054 , USA |
| Abstract: | A method for measuring parallelism of transparent optical components with small aperture size is described. It uses a Haidinger-type laser interferometer adapted for the measurement of optical components with millimeter and sub-millimeter aperture size. The method is based on the measurement of the optical thickness variation when the plate under test is translated across a focused laser beam. Measurement results for optical parts with 0.8 mm–10 mm aperture size are presented. |
| Keywords: | interferometer laser wedge angle measurement parallelism |