| 硅微机械陀螺的研究 |
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| 引用本文： | 茅盘松,吴绍夫.硅微机械陀螺的研究[J].传感器与微系统,1995(4):23-24,29. |
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| 作者姓名： | 茅盘松 吴绍夫 |
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| 作者单位： | 东南大学 |
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| 摘 要： | 介绍硅微机械陀螺的研究。这种陀螺用半导体加工技术生产，该陀螺的突出优点是尺寸小、重量轻、功耗和成本低，它的进一步发展可使仪表小型化，可望从飞机、汽车到电子外科手术仪器和模型飞机等方面得到广泛应用。
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| 关 键 词： | 陀螺，微机械加工 |
Reseach on Silicon Micromechanical Gyroscope |
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| Mao Pansong, Wu Shaofu, Wang Xiulun.Reseach on Silicon Micromechanical Gyroscope[J].Transducer and Microsystem Technology,1995(4):23-24,29. |
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| Authors: | Mao Pansong Wu Shaofu Wang Xiulun |
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| Affiliation: | Southeast Univercity |
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| Abstract: | Silicon micromechanical gyroscope is introduced. This kind of gyroscope is processed with semiconduction processing technic. The most benefit of it is small size, low cost ect. Farther development of it will make instruction smaller, and will used widely in the field of automotor, aero ect. |
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| Keywords: | Gyroscope Micromechining |
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