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TFT-LCD面板化学蚀刻薄化研究及产品可靠性分析
引用本文:姜明俊,尚进,李荣玉.TFT-LCD面板化学蚀刻薄化研究及产品可靠性分析[J].现代显示,2009,20(5):35-38.
作者姓名:姜明俊  尚进  李荣玉
作者单位:上海交通大学电子信息与电气工程学院,上海,200240
摘    要:以化学蚀刻薄化技术为课题,介绍了化学蚀刻的原理、方式;TFT-LCD液晶面板经过HF溶液化学蚀刻后,原来的单片玻璃厚度从0.7mm减薄至0.5mm厚度,薄化后的液晶面板经后段生产组装成LCM模块,经过各项可靠性分析来验证产品可能出现的问题,为TFT-LCD生产中的化学蚀刻薄化技术提供参考。文章主要探讨了TFT-LCD薄板化生产,包括化学蚀刻方式、产品的性质,产品的可靠性项目等。

关 键 词:化学蚀刻  液晶面板  薄板化
收稿时间:2009/3/2

TFT-LCD's Thin' ning Technology and Reliability of Product
JIANG Ming-jun,SHANG Jin,LI Rong-yu.TFT-LCD's Thin' ning Technology and Reliability of Product[J].Advanced Display,2009,20(5):35-38.
Authors:JIANG Ming-jun  SHANG Jin  LI Rong-yu
Affiliation:1. Department of Electronic Engineering,Shanghai Jiao Tong University,Shanghai 200240)
Abstract:This paper give a summary research on the chemical etching technology, introduce the principle and method of chemical etching. TFT-LCD panel's thickness is slimmed from 0.7mm to 0.5mm by HF chemical etching. With the product reliability test and analysis, give the reference to TFT-LCD production with chemical etching technology. The major comment in the paper is TFT-LCD slimming production about chemical etching, figure of product, reliability of product etc.
Keywords:chemical etching  LCD panel  thin'ning
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