类金刚石薄膜的表面纳米划擦性能评价

用射频等离子体增强化学气相沉积在钛合金表面制备了类金刚石薄膜，利用纳米压入及其附件研究了薄膜与纳米划擦有关的力学性能。结果表明：随薄膜厚度的增加，其硬度略有增加，但增幅较小，弹性量没有明显的相应规律；薄膜在划擦过程中，随载荷增加，先后经历薄膜变形、薄膜与基体共同变形及薄膜剥离三个阶段；在薄膜变形阶段，划擦对薄膜的损害较小；当压头进入薄膜一定深度后，划擦后薄膜与基体的变形不同步，造成薄膜沿划痕向两边形成整齐排列的小裂纹，呈鱼骨状；达到临界载荷值时，薄膜在界面处发生脆性剥落；随膜厚增加，薄膜的临界载荷增大，因其残余应力的相应增大而发生大面积性剥东。

Assessment of Nano-Scratch Resistance of Diamond-Like Carbon Films

Diamond-like carbon (DLC) films were prepared on Ti alloy substrate with an rf- plasma enhanced chemical vapor deposition method (rf PECVD), their nano-mechanical properties were evaluated by using a Nano Indenter system with attachments of Continues Stiffoess Measure- ment (CSM) and lateral force measurement (LFM). The results show that the hardness of those films increases with film thickness, but their increment is small; during scratching, three processes containing fully elastic recovery, asynchronous recovery of films and substrate, and delaminating of films, successively occur as the increase of load; at the first regime, no damage could be found on the surface of films, in the second regime, the trace like fish bone formed; as the thickness of films increases, the critical load increases, but the delamination of films is more severe, which may be attributed to the increase of internal stress in the films.