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2831/2位BCCD模拟延迟线的研制
引用本文:胡世忠 贾晋冀. 2831/2位BCCD模拟延迟线的研制[J]. 半导体光电, 1990, 11(3): 210-215
作者姓名:胡世忠 贾晋冀
作者单位:重庆光电技术研究所,重庆光电技术研究所 重庆市永川 632163,重庆市永川 632163
摘    要:采用四相埋沟结沟制作了器件,其转移效率超过99.99%,时钟频率超过10MHz。本文阐述了器件原理、结构和工艺以及提高器件参数的重要途径。

关 键 词:BCCD 模拟 延迟线 结构 工艺

Research & Development of 283~(1/2) Bit BCCD Analog Delay Lines
Hu Shizhong Jia Jinji Chongqing Optoelectronics Research institute Yongehuan,Chongqing. Research & Development of 283~(1/2) Bit BCCD Analog Delay Lines[J]. Semiconductor Optoelectronics, 1990, 11(3): 210-215
Authors:Hu Shizhong Jia Jinji Chongqing Optoelectronics Research institute Yongehuan  Chongqing
Affiliation:Hu Shizhong Jia Jinji Chongqing Optoelectronics Research institute Yongehuan,Chongqing 632163
Abstract:A 283(1/2) bit BCCD analog delay line whose transfer efficiency is over 99.99% and clock frequency over 10 MHz has been fabricated with four-phase buried struclute.The principle,configuration and technology of the device are des- cribed as weIl as an important approach to the impmovement of the device parameters.
Keywords:Analog Delay Line  Configuration and Process
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