Microfabricated Lamb wave device based on PZT sol-gel thin film formechanical transport of solid particles and liquids |
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| Authors: | Luginbuhl P Collins SD Racine G-A Gretillat M-A De Rooij NF Brooks KG Setter N |
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| Affiliation: | Inst. of Microtechnol., Neuchatel Univ.; |
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| Abstract: | The fabrication using silicon micromachining and characterization of an acoustic Lamb wave actuator is presented. The intended use of the device is for mass transport and sensor applications. The device consists of dual interdigitated transducers patterned on a thin-film composite membrane of silicon nitride, platinum, and a sol-gel-derived piezoelectric ceramic (PZT) thin film. The acoustic properties of the device are presented along with preliminary applications to mechanical transport and liquid delivery systems. Improved acoustic signals and improved mass transport are achieved with PZT over present Lamb wave devices utilizing ZnO or AlN as the piezoelectric transducer |
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