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| 电阻热效应对力式微固态测风传感器测量精度的影响 | |
| 引用本文： | 杜利东,赵湛,庞程,方震,韩有君,翟文业,刘泳宏.电阻热效应对力式微固态测风传感器测量精度的影响[J].功能材料与器件学报,2009,15(4). |
| 作者姓名： | 杜利东 赵湛 庞程 方震 韩有君 翟文业 刘泳宏 |
| 作者单位： | 1. 中国科学院电子学研究所传感器国家重点实验室北京100190;中国科学院研究生院,北京,100190 2. 中国科学院电子学研究所传感器国家重点实验室北京100190 3. 解放军理工大学气象学院,南京,211101 4. 山西省大同市浑源县李峪中学,037400 |
| 摘 要： | 本文就电阻热效应对基于风的拖动力原理的微型固态测风传感器测量精度的影响进行了研究.微型固态测风传感器通过溅射在悬梁上的铂电阻测量悬梁弯曲应变来获得风速信息和简单的风向信息.风吹过铂电阻时,除了应变引起电阻阻值变化外,由于热传导、对流、辐射等热效应,其阻值也会随着风速的变化而变化.当热效应引起的电阻的变化趋势和应变引起的电阻变化趋势相反时,传感器的输出先减小后增大,风速测量产生较大误差.文中对两种铂电阻在悬梁上的放置连接方式的传感器进行了理论分析,通过对利用MEMS工艺制作的两种传感器的测试,证实理论分析与实验结果相符. |
| 关 键 词： | 测风 热效应 电桥 |
Influence of Resistor Thermal Effect in Wind Measurement Using Micro Solid State Drag Force Wind Sensor |
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| DU Li-dong,ZHAO Zhan,PANG Cheng,FANG Zhen,HAN You-jun,ZHAI Wen-ye,LIU Yong-hong.Influence of Resistor Thermal Effect in Wind Measurement Using Micro Solid State Drag Force Wind Sensor[J].Journal of Functional Materials and Devices,2009,15(4). | |
| Authors: | DU Li-dong ZHAO Zhan PANG Cheng FANG Zhen HAN You-jun ZHAI Wen-ye LIU Yong-hong |
| Affiliation: | 1.State Key Laboratory of Transducer Technology;Institute of Electronics;Chinese Academy of Sciences;Beijing 100190;China;2.Graduate University of Chinese Academy of Sciences Beijing 100190;3.Institute of Meteorology;PLA University of Science & Technology;Nanjing 211101;4.Liyu Middle School Hunyuan Datong;Shanxi 037400;China |
| Abstract: | The influence of resistor thermal effect in flow measurement using micro solid state drag force wind sensor is researched in this paper.The wind velocity and simply wind front or back directions are obtained by measuring the strain of cantilever of the micro solid state drag force wind sensor.The strain is measured using platinum resistor made by sputtering.When wind blows over resistor the resistance of it will vary with the wind velocity because the thermal conduction,convection and radiation between envi... |
| Keywords: | MEMS |
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