| 近规整多孔硅电化学制备与表征 |
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| 引用本文： | 汪婷,黎学明,李武林,文军. 近规整多孔硅电化学制备与表征[J]. 功能材料, 2011, 42(5): 869-871,876 |
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| 作者姓名： | 汪婷 黎学明 李武林 文军 |
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| 作者单位： | 重庆大学,化学化工学院,重庆,400030 |
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| 基金项目： | 国家自然科学基金，中央高校基本科研业务费重点资助项目 |
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| 摘 要： | 电化学阳极氧化条件对多孔硅孔排列的规整度有着显著的影响.提出了一种不需阳极氧化铝模板或预图案化而直接制备近规整多孔硅的电化学方法,分析了氧化时间、电解液组成、HF浓度对多孔硅形态的影响.结果表明,随着阳极氧化时间的增加,多孔硅孔的深度逐渐加大,孔径则呈先增大后稳定的趋势.当氢氟酸(40%)与N-N-二甲基甲酰胺(DMF...
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| 关 键 词： | 多孔硅 电化学阳极氧化 近规整 |
Fabrication and characterization of quasi-regular arranged porous silicon |
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| WANG Ting,LI Xue-ming,LI Wu-lin,WEN Jun. Fabrication and characterization of quasi-regular arranged porous silicon[J]. Journal of Functional Materials, 2011, 42(5): 869-871,876 |
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| Authors: | WANG Ting LI Xue-ming LI Wu-lin WEN Jun |
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| Affiliation: | WANG Ting,LI Xue-ming,LI Wu-lin,WEN Jun (College of Chemistry and Chemical Engineering,Chongqing University,Chongqing 400030,China) |
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| Abstract: | The regularity of pore arrangements of porous silicon prepared by electrochemical process depends sensitively on the anodization parameters.In this work,self-assembly quasi-regular pore arrangements have been fabricated by electrochemical anodization without prestructuring or PAA template.Effect of electrolyte composition,HF mass fraction and anodization time on morphology of porous silicon is analyzed respectively.The result shows that the pore depth increases,the pore diameter increases firstly and then s... |
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| Keywords: | porous silicon electrochemical anodization quasi-regular |
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