| 基于NiFeCo/Cu多层膜巨磁电阻效应的磁微球检测 |
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| 引用本文： | 牛永波,冯洁,陈翔,郑金平.基于NiFeCo/Cu多层膜巨磁电阻效应的磁微球检测[J].功能材料与器件学报,2008,14(6). |
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| 作者姓名： | 牛永波 冯洁 陈翔 郑金平 |
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| 作者单位： | 上海交通大学,微纳科学技术研究院,微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海,200030 |
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| 基金项目： | 国家高技术研究发展计划(863计划)
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| 摘 要： | 分析了应用于磁性生物检测的GMR传感器的工作原理.直流磁控溅射法制备了Ni65Fe15CO20/Cu多层膜,研究了室温下多层膜的GMR效应对缓冲层(NiFeCo)厚度、间隔层(Cu)厚度及铁磁层(NiFeCo)厚度等参数的依赖关系,得到了GMR值达8.8%的多层膜样品:缓冲层(NiFeCo)5nm,间隔层(Cu)2.4nm,铁磁层(NiFeCo)1.6nm,且饱和场低、磁滞小、灵敏度较高,符合磁性生物检测技术的要求.制备了基于优化参数NiFeCo/Cu多层膜的GMR传感器,对器件的性能进行了测试,结果表明所制备的GMR传感器能够检测磁微球.
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| 关 键 词： | 巨磁电阻效应 多层膜 磁性生物传感器 |
Detections of magnetic microbeads based on GMR of NiFeCo/Cu multilayers |
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| NIU Yong-bo,FENG Jie,CHEN Xiang,ZHENG Jin-ping.Detections of magnetic microbeads based on GMR of NiFeCo/Cu multilayers[J].Journal of Functional Materials and Devices,2008,14(6). |
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| Authors: | NIU Yong-bo FENG Jie CHEN Xiang ZHENG Jin-ping |
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| Affiliation: | NIU Yong-bo,FENG Jie,CHEN Xiang,ZHENG Jin-ping(National Key Laboratory of Micro/ Nano Fabrication Technology,Key Laboratory for Thin Film , Microfabrication Technology of Ministry of Education,Institute of Micro , Nano Science , Technology,Shanghai Jiao Tong University,Shanghai 200030,China) |
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| Abstract: | The principle of GMR sensors for applications in magnetic biosensor was analyzed.Ni65Fe15Co20/Cu multilayers were prepared by DC magnetron sputtering.Dependences of GMR on the thicknesses of buffer layer(NiFeCo),spacer layer(Cu),and ferromagnetic layer(NiFeCo) were studied,respectively.The maximum GMR of 8.8% was obtained for the as-deposited sample: buffer layer 5nm,spacer layer Cu 2.4nm,ferromagnetic layer NiFeCo 1.6nm,and the saturation field and the hysteresis of the sample were small,which means that t... |
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| Keywords: | NiFeCo/Cu |
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