Dimensional effects observed for the electrical, dielectrical and optical properties of TiO2 DC magnetron thin films

In this paper, we present the dimensional effects observed for TiO₂ films deposited by DC circular magnetron sputtering. TiO₂ thin films are deposited in an Al–TiO₂–Al structure to investigate their non-linear characteristics, from which the carrier effective mass and the barrier potential at the Al–TiO₂ interface is calculated, and an important relationship between the effective carrier mass and film thickness is observed. The dielectric constant of TiO₂ thin films is also investigated, and is observed to vary with TiO₂ film thickness. Further, TiO₂ band gap is observed to vary with film thickness.