Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system |
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| Authors: | Dick De Roover Okko H Bosgra |
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| Affiliation: | 1. SC Solutions Inc. , 3211 Scot Boulevard, Santa Clara, CA, 95054, USA;2. Mech. Eng. Systems and Control Group , Delft University of Technology , Mekelweg 2, Delft, 2628, CD, The Netherlands |
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| Abstract: | Iterative Learning Control (ILC) is a powerful control concept that iteratively improves the transient behaviour of processes that are repetitive in nature. Although most of the published ILC schemes are heuristic in nature, some initial research has been performed on the formulation of the ILC problem in the H |
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