| 离子束辅助沉积MoS2复合膜的XPS和ESR特性分析 |
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| 引用本文： | 富均,杨传仁,杨大本. 离子束辅助沉积MoS2复合膜的XPS和ESR特性分析[J]. 真空科学与技术学报, 1999, 19(2) |
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| 作者姓名： | 富均 杨传仁 杨大本 |
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| 作者单位： | 电子科技大学材料系!成都610054(富均，杨传仁，杨大本)，四川大学原子核科学技术研究所!成都610064(王培禄，黄宁康) |
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| 基金项目： | 兰州化学物理研究所固体润滑开放实验室资助课题 |
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| 摘 要： | 通过IBAD技术制备了MoS2 Ag(Cu)复合膜 ,并利用XPS和ESR考察了复合膜的氧化情况。发现在RH为 6 0 %的大气环境下 ,Cu的掺入加速了MoS2 的氧化 ,相反Ag的加入却使MoS2 的氧化受到抑制 ;XPS发现MoS2 Cu复合膜中存在Mo6 ,ESR却并没发现中间态Mo5 ;而XPS没有检测到MoS2 Ag膜中有Mo6 ,ESR却发现Mo5 。这说明Mo5 受化学环境影响较大
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| 关 键 词： | 抗湿性能 离子束辅助沉积 复合膜 |
XPS and ESR Studies of Metal/MoS_2 Composite Films Grown by Ion Beam Assisted Deposition |
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| Gou Fujun,Yang Chuanren,Yang Daben. XPS and ESR Studies of Metal/MoS_2 Composite Films Grown by Ion Beam Assisted Deposition[J]. JOurnal of Vacuum Science and Technology, 1999, 19(2) |
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| Authors: | Gou Fujun Yang Chuanren Yang Daben |
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| Abstract: | Ag(Cu)/MoS 2 composite thin films were grown by IBAD.The films were studied with XPS and ESR to understand the mechanism of the film oxidation.The results have shown that at the relative humidity of RH=60% in the ambient environment,oxidation was found to be accelerated in Cu doped MoS 2 films,whereas the oxidation was slowed down in Ag doped MoS 2 films.XPS analysis revealed that Mo 6 only exists in Cu doped MoS 2 films but not instead of Ag doped MoS 2 films.On the other hand,ESR results showed that intermediate state Mo 5 exists in Ag doped but not in Cu doped MoS 2 films.We suggest that the chemical environments may strongly affect Mo 5 . |
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| Keywords: | Anti humility performance Ion beam assisted deposition Composite film |
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