| 塑料基体低温沉积ITO薄膜的研究 |
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| 引用本文： | 李世涛,乔学亮,陈建国. 塑料基体低温沉积ITO薄膜的研究[J]. 材料导报, 2004, 18(11): 3-5 |
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| 作者姓名： | 李世涛 乔学亮 陈建国 |
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| 作者单位： | 华中科技大学国家模具技术重点实验室·表面实验室,武汉,430074;华中科技大学国家模具技术重点实验室·表面实验室,武汉,430074;华中科技大学国家模具技术重点实验室·表面实验室,武汉,430074 |
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| 摘 要： | 综述了塑料基体低温沉积ITO薄膜国内外的最新研究现状,并指出了现在存在的问题,认为实现低温沉积、保证薄膜的光电性能和改善薄膜表面质量是3个关键技术.同时结合自己的研究工作,提出了相应的解决方法和建议.
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| 关 键 词： | ITO薄膜 塑料基体 低温 |
Indium Tin Oxide Films Deposited on Plastic Substrate at Low Temperature |
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| LI Shitao QIAO Xueliang CHEN Jianguo. Indium Tin Oxide Films Deposited on Plastic Substrate at Low Temperature[J]. Materials Review, 2004, 18(11): 3-5 |
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| Authors: | LI Shitao QIAO Xueliang CHEN Jianguo |
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| Abstract: | The latest domestic and overseas research advances in Indium Tin Oxide (ITO) films deposited on plastic substrate at low temperature are described in the paper. Technological problems of ITO films are pointed out. The three pivotal technologies are as follows: how ITO films deposit at low temperature, how the photoelectron properties are enhanced and the surface quality is improved. In the end, in combination with their researches the authors raise suggestions and give methods to solve those problems. |
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| Keywords: | ITO films plastic substrate low temperature |
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