| 金刚石膜气相沉淀技术中微波等离子体反应腔的数值模拟 |
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| 引用本文： | 邹卫生,孙亦宁. 金刚石膜气相沉淀技术中微波等离子体反应腔的数值模拟[J]. 真空与低温, 2000, 6(2): 86-90 |
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| 作者姓名： | 邹卫生 孙亦宁 |
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| 作者单位： | 兰州大学物理系!甘肃兰州730000(邹卫东，杨磊，杨孔庆)，兰州物理研究所!甘肃兰州730000(孙亦宁) |
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| 摘 要： | 采用有限积分法(FIT算法) ,并利用一种简单的等离子体模型模拟了具有轴对称的微波等离子体反应腔中微波场与等离子体的行为。计算出了给定等离子体的空间分布时电场的分布情况 ,以及给定电场的空间分布时等离子体的分布情况 ,从而得到微波———等离子体反应腔中电磁场稳定分布以及等离子体的放电位置。并依据实验中的一些可变参数 ,寻求影响等离子体放电位置的参数 ,为设计化学气相沉淀(CVD)技术沉积大面积金刚石膜微波反应腔提供依据
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| 关 键 词： | 数值模拟 电磁场 等离子体 微波反应腔 化学气相沉淀 |
NUMERICAL SIMULATIONS OF MICROWAVE PLASMA REACTORS FOR DIAMOND CVD |
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| ZOU Wei dong,YANG Lei,SUN Yi ning,YANG Kong qing. NUMERICAL SIMULATIONS OF MICROWAVE PLASMA REACTORS FOR DIAMOND CVD[J]. Vacuum and Cryogenics, 2000, 6(2): 86-90 |
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| Authors: | ZOU Wei dong YANG Lei SUN Yi ning YANG Kong qing |
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| Affiliation: | ZOU Wei dong1,YANG Lei1,SUN Yi ning2,YANG Kong qing1 |
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| Abstract: | Based on the Finite Integration Theory(FIT), a simple model has been developed to simulate the electromagnetic field and plasma densities in a rotational symmetric microwave-reactor.The computer programs calculate alternately the electric field for a given spatial distribution of the plasma and the plasma for a given distribution of the electric field.A self consistent solution of electromagnetic field in the microwave field plasma system and the location of discharge of plasma have been obtained.Considering some adjusted parameters in the experiments,the parameters which effect the location of discharge of plasma have been discussed. So the design of the microwave plasma reactor for large area diamond CVD can be predicated. |
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| Keywords: | numerical simulation electromagnetic plasma microwave reactor CVD |
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