Mott factors of P,V, Fe,Ga, As,Pd, In,Ta, and W for 500–3000 eV electrons

Mott scattering factors are needed for the quantitative interpretation of elastic scattering phenomena in electron spectroscopy and microscopy. The inelastic mean free path of electrons has been deduced from the elastic peak intensity. The theoretical approach is based on the effective elastic cross section derived from the differential elastic cross sections. In the present work they are calculated using the partial wave expansion method, supplying as well the Mott scattering factors. Tabulated data are presented for a number of elements and 500–3000 eV electrons in steps of 2° or 5° of the scattering angle θ. The effective and total elastic scattering cross sections are also presented.