The use of hydrogen passivation to fabricate Schottky diodes for DLTS measurements of heavily-doped p+ Si

Schottky diodes were successfully fabricated on p⁺ Si for deep-level transient spectroscopy (DLTS) measurements by the use of hydrogen passivation of boron. Atomic hydrogen was introduced into the near-surface region of boron-doped (1 0 0) CZ Si crystals, which had a resistivity of about 0.01 Ω cm, at temperatures between room temperature and 300°C by exposure to a hydrogen plasma. Rectifying characteristics were obtained for fabricated Schottky contacts on hydrogenated samples. This was due to the carrier concentration decrease in the near-surface region by hydrogen passivation of boron. As the hydrogenation temperatures were increased, the decrease in carrier concentration was significant. Some results of DLTS measurements were given for fabricated diodes.