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| 半导体表面晶体完整性的SEM电子通道花样研究 | |
| 引用本文： | 邱素娟,林奇全.半导体表面晶体完整性的SEM电子通道花样研究[J].半导体学报,1991,12(1):23-27. |
| 作者姓名： | 邱素娟 林奇全 |
| 作者单位： | 机电部第十三研究所 石家庄050051 (邱素娟)，机电部第十三研究所 石家庄050051(林奇全) |
| 摘 要： | 本文对各种GaAs晶体表面作了SEM电子通道技术测量,对测得的电子通道花样进行了结晶学注释,确定了评价晶体完整性的标准。可广泛用来检查和评估半导体表面的晶体完整性. |
| 关 键 词： | GaAs晶体 SEM 电子通道像 |
Study on Crystal Perfection of Semiconductor Surfaces by SEM Electron Path Patterns |
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| Qiu Sujuan/The th Institute of Ministry of Mochinery & Electronics IndustriesLin Qiquan/The th Institute of Ministry of Mochinery & Electronics Industries.Study on Crystal Perfection of Semiconductor Surfaces by SEM Electron Path Patterns[J].Chinese Journal of Semiconductors,1991,12(1):23-27. | |
| Authors: | Qiu Sujuan/The th Institute of Ministry of Mochinery & Electronics IndustriesLin Qiquan/The th Institute of Ministry of Mochinery & Electronics Industries |
| Affiliation: | Qiu Sujuan/The 13th Institute of Ministry of Mochinery & Electronics IndustriesLin Qiquan/The 13th Institute of Ministry of Mochinery & Electronics Industries |
| Abstract: | Various GaAs crystal surfaces have been investigated with SEM electron passage patternmethod. Crystallography annotations have been made, and a standard to evaluate the crystalperfection has been defined. The method can be widely used for examining and appraisingthe crystal perfection of semiconductor surfaces. |
| Keywords: | Electron passage photograph Crystal-band Crystal-surface Crystal perfection GaAs |
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