| PDP制造中的曝光技术研究 |
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| 引用本文： | 卜忍安,张劲涛. PDP制造中的曝光技术研究[J]. 液晶与显示, 2001, 16(3): 214-219 |
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| 作者姓名： | 卜忍安 张劲涛 |
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| 作者单位： | 西安交通大学电子物理与器件研究所陕西西安 710049 E-mail:bura@xjtu.edu.cn |
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| 基金项目： | 国家"九五”攻关项目资助 |
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| 摘 要： | 在分析PDP曝光特点的基础上,提出了PDP曝光台的设计原则,说明了PDP曝光时的照度分布调整方法以及校正透镜的原理,作用和加工方法,对使用光量计精确控制曝光量以及曝光台超高压水银灯的特点,作用和选择作了详细介绍。介绍了曝光工艺中利用光量计确定感光材料界限曝光量的原理和方法。最后对PDP丝网曝光工艺作了简要介绍。
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| 关 键 词： | PDP 曝光台 照度分布 感光域 曝光技术 设计原则 工艺 等离子体显示器件 |
| 文章编号： | 1007-2780(2001)03-0214-06 |
| 修稿时间： | 2001-01-16 |
Study of Exposure Technology for PDP Manufacturing |
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| BU Ren-an,ZHANG Jun,ZHANG Jin-tao. Study of Exposure Technology for PDP Manufacturing[J]. Chinese Journal of Liquid Crystals and Displays, 2001, 16(3): 214-219 |
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| Authors: | BU Ren-an ZHANG Jun ZHANG Jin-tao |
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| Abstract: | On the basis of analysizing the exposure characteristics of PDP, the design principle of PDP exposure equipment is put forward, the way of adjusting the distribution of luminance intensity is provided and the principle and function of correcting a lens and manufacturing method are explained. A detailed explanation how a quantometer is used to precisely control the exposure quantity is given. The characteristics, function and choices of the superhigh pressure mercury lamps are introduced. In addition, the principles and methods of determining the critical exposure quantity of sensitive materials are introduced and the screen exposure process is described briefly. |
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| Keywords: | PDP discontinuous lens critical exposure quantity sensitive region |
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