| O_2-C_2H_2燃焰法沉积金刚石薄膜工艺研究 |
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| 引用本文： | 陈哲,李雨葆,邵宁.O_2-C_2H_2燃焰法沉积金刚石薄膜工艺研究[J].粉末冶金材料科学与工程,1997(3). |
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| 作者姓名： | 陈哲 李雨葆 邵宁 |
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| 作者单位： | 冶金工业部钢铁研究总院，冶金工业部钢铁研究总院，冶金工业部钢铁研究总院 北京，100081，北京，100081，北京，100081 |
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| 摘 要： | 本文通过扫描电镜(SEM)观察、拉曼光谱(Raman)分析研究了O_2-C_2H_2系燃焰法沉积金刚石薄膜的整体生长特征及气体配比与基底在火焰中所处位置对金刚石生长习性、沉积速率及合成质量的影响。
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| 关 键 词： | O_2—C_2H_2火焰 燃焰法 金刚石薄膜 生长特性 |
INVESTIGATION ON DEPOSITION OF DIAMOND FILMS BY ACCETYLENE-OXYGEN COMBUSTION SYNTHESIS |
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| Chen Zhe,Li Yubao,Shao Ning Central Iron Steel Research Institude,Beijing,China.INVESTIGATION ON DEPOSITION OF DIAMOND FILMS BY ACCETYLENE-OXYGEN COMBUSTION SYNTHESIS[J].materials science and engineering of powder metallurgy,1997(3). |
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| Authors: | Chen Zhe Li Yubao Shao Ning Central Iron Steel Research Institude Beijing China |
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| Affiliation: | Chen Zhe,Li Yubao,Shao Ning Central Iron Steel Research Institude,Beijing,100081,China |
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| Abstract: | This paper has made an intensive investigation on the overall mophology of diamondfilms deposited by the accetylene-oxygen combustion synthesis and effects of the major pro-cessing parameters on films quality and deposition rate, using the scanning election mi-croscopy (SEM) and Raman spectroscopy. |
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| Keywords: | accetylene-oxygen flames combustion synthesis diamond films characterization |
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