An axial-emission self-modulating ion gauge |
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| Authors: | JZ Chen CD Suen YH Kuo |
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| Affiliation: | Shanghai Electronic Vacuum Device Institute, Shanghai, China;Shanghai Electric Power Tool Institute, Shanghai, China;Physics Department of Peking University, Beijing, China |
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| Abstract: | An axial-emission self-modulating ultra-high vacuum ion gauge (AESMG) based on developments of the axial-emission ion gauge (AEG) is described. The self-modulation technique used in AESMG operates by means of changing the potential of the collector. The AESMG has some advantages such as rather high sensitivity, simplicity of structure and the modulating coefficient of soft X-ray photocurrent is almost equal to unity. The limiting measurable pressure of AESMG is about 2 × 10?12 torr. |
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