| 原子力显微镜(AFM)力传感器及其固有频率的测试 |
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| 引用本文： | 薛实福 刘永生 等. 原子力显微镜(AFM)力传感器及其固有频率的测试[J]. 光学精密工程, 1995, 3(2): 42-46 |
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| 作者姓名： | 薛实福 刘永生 等 |
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| 作者单位： | 清华大学精密仪器及机械学系 |
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| 摘 要： | 由悬臂梁与探针集成件(Cantilever stylus)组成的力传感器是原子力显微镜的一个关键部件,固有频率(resonant frequency)是悬臂梁与探针集成件的一个重要技术指标,本文介绍了对力传感器的要求、力传感器的设计、检测力传感器的方法,着重介绍了一种采用光学象散原理组成的传感器的固有频率测试系统与方法。
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| 关 键 词： | 原子力显微镜 悬臂梁探针 固有频率 |
| 收稿时间： | 1994-11-17 |
Atomic Force Microscope Force sensors and Its Resonant Frequency Testing |
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| Xue Shifu,Liu Yongsheng,Li Qingxiang,Gao Hong and,Yu Shui. Atomic Force Microscope Force sensors and Its Resonant Frequency Testing[J]. Optics and Precision Engineering, 1995, 3(2): 42-46 |
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| Authors: | Xue Shifu Liu Yongsheng Li Qingxiang Gao Hong and Yu Shui |
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| Affiliation: | Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084 |
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| Abstract: | In Atomic Force Microscope(AFM),the force sensor,canilever with integrated tip,id acrucial component ,and its resonant frequency is a main technical parameter.In this paper,the specification,design and testing of the force sensor are presentcd. A method based on opticastigmation principles to test the resonant frequency of the force sensors is described in detail |
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| Keywords: | Atomic forcc microscope Cantilcver stylus Resonant frcquoncy |
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