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标准粒子发生器研制
引用本文:魏峥. 标准粒子发生器研制[J]. 洁净与空调技术, 2008, 0(3)
作者姓名:魏峥
作者单位:中国建筑科学研究院建筑环境与节能研究院,100013
摘    要:激光尘埃粒子计数器是测试洁净度必不可少的仪器,在洁净行业中有很重要的地位.本文介绍的自主研制的标准粒子发生器是校准和测试激光尘埃粒子计数器的基准仪器.国内暂时没有同类仪器,国外的仪器昂贵且维护周期长.本文介绍的仪器通过比较国外多种不同类型的发生器,确定适合我国实际需要的技术路线:成本低廉,性能满足要求.在通过大量比对试验后,证明本仪器满足实际使用的需要,并且某些性能甚至超过了国外产品.

关 键 词:激光尘埃粒子计数器  PSL标准粒子  发生器

Development of Standard Particle Generator
Wei Zheng. Development of Standard Particle Generator[J]. Contamination Control & Air-Conditioning Technology, 2008, 0(3)
Authors:Wei Zheng
Abstract:Laser particle counter is necessary in cleanliness test and has important position in cleanroom field.The standard particle generator is the reference apparatus for calibration and test of laser particle counter.The local market has no such apparatus,while foreign ones are expensive and long cycle in maintenance.The generator we developed is low in price and satisfactory or even better in performance,by comparison with various foreign ones,with right technique suitable to actual demands.
Keywords:Laser particle counter  PSL standard particle  Generator
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