| 柔性衬底氧化物半导体透明导电膜的研究进展 |
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| 引用本文： | 郝晓涛,张德恒,马瑾,杨莺歌,王卿璞,程传福,田茂华,马洪磊.柔性衬底氧化物半导体透明导电膜的研究进展[J].功能材料,2002,33(4):354-356,359. |
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| 作者姓名： | 郝晓涛 张德恒 马瑾 杨莺歌 王卿璞 程传福 田茂华 马洪磊 |
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| 作者单位： | 1. 山东大学物理与微电子学院,山东,济南,250100
2. 山东师范大学物理系,山东济南,250014 |
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| 基金项目： | 国家自然科学基金资助项目 (698760 2 5，60 0 760 0 6)，山东省科委，山东省自然科学基金资助项目 |
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| 摘 要： | 回顾和评述了柔性衬底氧化物透明导电膜（包括锡掺杂的三氧化二铟ITO薄膜、铝掺杂的氧化锌AZO薄膜等）的研究进展情况。报道了在柔性衬底上制备的ITO膜、ZnO膜的光电性质对衬底种类、制备工芑及制备参数的依赖关系，给出了在此领域内应进一步进行的工作。
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| 关 键 词： | 柔性衬底 氧化物半导体 透明导电膜 研究进展 |
| 文章编号： | 1001-9731(2002)04-0354-03 |
Process in transparent conducting oxide films prepared on flexible substrates |
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| HAO Xiao tao ,ZHANG De heng ,MA Jin ,YANG Ying ge ,WANG Qing pu ,CHENG Chuan fu ,TIAN Mao hua ,MA Hong lei.Process in transparent conducting oxide films prepared on flexible substrates[J].Journal of Functional Materials,2002,33(4):354-356,359. |
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| Authors: | HAO Xiao tao ZHANG De heng MA Jin YANG Ying ge WANG Qing pu CHENG Chuan fu TIAN Mao hua MA Hong lei |
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| Affiliation: | HAO Xiao tao 1,ZHANG De heng 1,MA Jin 1,YANG Ying ge 1,WANG Qing pu 1,CHENG Chuan fu 2,TIAN Mao hua 1,MA Hong lei 1 |
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| Abstract: | The progress in the study on TCO films (including ITO films and AZO films) prepared on organic substrates was reviewed in this paper. It was also reported that the optical and electronic properties of films deposited on flexible substrates depend on substrate types, preparation techniques and parameters. In addition, the future work that should be done in this field was mentioned. |
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| Keywords: | flexible substrates oxide semiconductors transparent conducting films |
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