| 磁控溅射MoS2＋Sb2O3防冷焊薄膜性能研究 |
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| 引用本文： | 陆峰,徐成海,闻立时. 磁控溅射MoS2＋Sb2O3防冷焊薄膜性能研究[J]. 真空与低温, 2001, 7(3): 139-143 |
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| 作者姓名： | 陆峰 徐成海 闻立时 |
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| 作者单位： | 1. 东北大学,机械工程与自动化学院,辽宁,沈阳,110004
2. 中国科学院,金属研究所,辽宁,沈阳,110016 |
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| 摘 要： | MoS2溅射膜具有在潮湿大气中容易发生氧化而失去润滑作用的缺点.为了解决这个问题,将Sb2O3添加于MoS2中,用磁控溅射法制备了MoS2+Sb2O3薄膜,并利用球-盘式磨损试验机考察了它对薄膜摩擦特性的影响.通过XRD、XPS、AFM对MoS2+Sb2O3薄膜的微观结构和形貌及其化学状态进行了分析.实验结果表明薄膜的微观结构致密、晶粒小、分布均匀,有良好的润滑性、防冷焊性,特别适用于卫星活动部件的固体润滑.
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| 关 键 词： | MoS2溅射膜 抗湿性能 摩擦学性能 防冷焊 |
| 文章编号： | 1006-7086(2001)03-0139-05 |
| 修稿时间： | 2001-03-08 |
THE PROPERTIES OF MoS2 + Sb2O3 ANTI-COLD WELDING THIN FILM BY MAGNETRON SPUTTERING |
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| CHEN Tao,YAN Chang_lin,ZHAO Yun_ping,WAN Zhi_hua,BAI Zhi_fang. THE PROPERTIES OF MoS2 + Sb2O3 ANTI-COLD WELDING THIN FILM BY MAGNETRON SPUTTERING[J]. Vacuum and Cryogenics, 2001, 7(3): 139-143 |
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| Authors: | CHEN Tao YAN Chang_lin ZHAO Yun_ping WAN Zhi_hua BAI Zhi_fang |
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| Abstract: | MoS 2 has excellent lubrication properties,but sputtered MoS 2 films have obvious shortcomings that they were oxidized easily and the lubrication properties are lost in moist air.In order to resolve the problem,sputtered MoS 2 films dopped with Sb 2O 3 on tribological properties were investigated with ball_disk tester.The microstructure morphology and the chemical states of sputtered MoS 2 films were analyzed using XRD, AFM and XPS.The experimental results indicate the film has dense microstructure, small crystal size and uniform distribution.It has excellent lubrication and anti_cold welding properties, especially applied to solid lubrication of moving mechanisms of satellites. |
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| Keywords: | sputtered MoS 2 film moisture resistance properties trubological behavior anti-cold welding |
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