| 一种适用于MEMS麦克风的新型恒压电荷泵设计 |
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| 引用本文： | 张文杰,杨凤,段杰斌,谢亮,金湘亮.一种适用于MEMS麦克风的新型恒压电荷泵设计[J].固体电子学研究与进展,2013,33(3). |
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| 作者姓名： | 张文杰 杨凤 段杰斌 谢亮 金湘亮 |
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| 作者单位： | 湘潭大学材料与光电物理学院,湖南,湘潭,411105 |
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| 基金项目： | 国家科技重大专项资助项目，教育部新世纪优秀人才支持计划资助项目 |
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| 摘 要： | 实现了一种新型恒压输出电荷泵电路,通过选择合理的电荷泵结构能有效抑制反向电流及衬底电流,并通过一种负反馈稳压电路得到低纹波且不随电源电压变化的稳压输出,非常适用于MEMS麦克风。该电路采用MIXIC0.35μm标准CMOS工艺实现,测试结果表明该电路能自适应2.8～3.6V的电源电压变化,输出稳定的9V直流电压。
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| 关 键 词： | 电荷泵 衬底电流 辅助金属氧化物半导体场效应晶体管 恒压输出 微机电系统麦克风 |
Design of a New Constant Voltage Output Charge Pump for MEMS Microphones |
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| ZHANG Wenjie
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YANG Feng
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DUAN Jiebin
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XIE Liang
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JIN Xiangliang.Design of a New Constant Voltage Output Charge Pump for MEMS Microphones[J].Research & Progress of Solid State Electronics,2013,33(3). |
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| Authors: | ZHANG Wenjie YANG Feng DUAN Jiebin XIE Liang JIN Xiangliang |
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| Abstract: | This article realizes a new constant voltage output charge pump.By selecting an appropriate charge pump structure,this charge pump can suppress reverse current and substrate current efficiently.By using a negative feedback regulator circuit,the circuit outputs a low ripple DC voltage,which does not vary with the supply voltage and is very suitable for the MEMS microphone.The circuit was verified in MXIC 0.35 μm CMOS technology.The test result indicates the proposed charge pump circuit is capable of self-adapting supply voltage between 2.8 V to 3.6 V and outputting 9 V constant DC voltage. |
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| Keywords: | charge pump substrate current auxiliary MOSFET constant voltage output MEMS microphone |
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