Design and Imaging Application of Room-Temperature Terahertz Detector with Micro-Bolometer Focal Plane Array |
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Authors: | Jun Wang Jun Gou Zhi-Ming Wu Ya-Dong Jiang |
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Affiliation: | 1.School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China |
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Abstract: | Room-temperature terahertz (THz) detectors indicate a great potential in the imaging application because of their real-time, compact bulk, and wide spectral band responding characteristics. THz detectors with different dimensions based on a micro-bridge structure have been designed and fabricated to get optimized micro-bolometer parameters from the test results of membrane deformation. A nanostructured titanium (Ti) thin film absorber is integrated in the micro-bridge structure of the VOx micro-bolometer by a combined process of magnetron sputtering and reactive ion etching (RIE), and its improvement of THz absorption is verified by an optical characteristics mesurement. Continuous-wave THz detection and imaging are demonstrated by using a 2.52 THz far infrared CO2 laser and a 320240 vanadium oxide micro-bolometer focal plane array with an optimized cell structure. With this detecting system, THz imaging of metal concealed in a wiping cloth and an envelope is demonstrated, respectively. |
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Keywords: | Focal plane array micro-bolometer structure real-time imaging room temperature terahertz detector |
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