衍射光学元件斜入射衍射效率的测量

针对衍射光学元件衍射效率测量的双光路实验装置，当次级衍射光通过孔径光阑由探测器接收时，为保证测量精度提出了测量衍射效率的修正公式。针对所研制的含有衍射光学元件的折衍射混合成像光学系统，选取可见光波段中的3个激光波长，当衍射面上入射角度为12时对该衍射光学元件进行了衍射效率的测量，并对测量结果进行了模拟和分析。由于存在一定的加工误差和斜入射时遮挡效应的影响，实际测得的衍射光学元件的衍射效率比理论计算结果低。根据测量结果拟合曲线，在473~632.8 nm波段范围内的带宽积分平均衍射效率对比理论值存在12.84%的偏差。

Measurement of diffraction efficiency for diffractive optical elements with oblique incidence

Based on the double light-path experiment device measuring for diffraction efficiency of diffractive optical elements(DOEs), a correcting formula of diffraction efficiency was introduced to ensure the measurement accuracy of diffraction efficiency when light of secondary order diffraction was received by the detector after passing through the pinhole aperture. The diffraction efficiency of the designed hybrid refractive-diffractive optical system was measured at three laser wavelengths over the visible waveband for the incident angle upon microstructure surface was 12. The measurement results were simulated and analyzed. Due to some manufacturing errors and blocking effect, the measured diffraction efficiency was smaller than the theoretical. Based on the fitted curve of measurement results, the deviation of the polychromatic integral diffraction efficiency from the theoretical value was 12.84% over the 473-632.8 nm waveband.