基于球曲面极板的电容式触觉传感器研究

为提升电子皮肤的触觉感知灵敏度，提出一种基于球曲面极板的电容式柔性触觉传感器。介绍了电容式柔性触觉传感器的结构特点与制备流程，并结合理论计算与ANSYS有限元仿真阐述其触觉感知机理，空间立体排布的球曲面感应极板和差分式结构特点可协同提升电容式柔性触觉传感器感知灵敏度。基于高性能电容数字转换器AD7147-1和STM32微处理器搭建容性触觉信号采集与处理系统，完成了电容式触觉传感器特性测试及应用研究。实验结果表明，该传感器可实现法向力与切向力的高灵敏检测和稳定性，动态响应时间约为70 ms，进一步论证了其用作电子皮肤的可行性。

Research on Capacitive Tactile Sensor Based on Spherical Surface Plate

To improve the sensing sensitivity of electronic skin (e-skin), a capacitive flexible tactile sensor based on spherical surface plate is proposed in this paper. The structural characteristics and fabrication process of the sensor was illustrated, meanwhile, the tactile sensing mechanism is also presented based on the combine of theoretical calculation and ANSYS finite element simulation. The sensitivity of the capacitive flexible tactile can be cooperatively improved based on the spatial arrangement of spherical surface plate and differential structure. Furthermore, the signal acquisition and processing system of the capacitive tactile sensor is constructed based on the high performance capacitive digital converter AD7147-1 and STM32 microprocessor, and the characteristic test and the application of the proposed device are also conducted. The experiment results show that the high sensitivity tactile sensing of normal force and tangential force and high stability can be obtained by using the capacitive tactile sensor with the spherical surface plate with a fast response time of 70 ms, and the feasibility of the capacitive tactile sensor used as electric skin is further demonstrated.