500W级半导体激光器光纤耦合输出模块设计

为实现亮度均匀、形状对称、高对称光束质量的高功率半导体激光输出，提出了一种基于mini-bar芯片的高功率光纤耦合系统设计方案，使用Zemax设计了一套针对200 m/NA0.22多模光纤的500 W级光纤耦合输出系统。设计使用反射镜-条纹镜系统实现单列叠层微通道封装芯片快轴方向光束的尺寸压缩，并结合偏振合束技术在不改变光束束参积的条件下将功率提高一倍，并使用慢轴扩束系统压缩慢轴方向发散角，最后采用非球面透镜耦合进目标光纤。在设计的基础上采用4列叠层微通道封装的叠阵（每列包含5个mini-bar芯片）进行了等效验证实验，在注入电流为37 A时得到稳定输出功率506 W的小型化模块，亮度达10.3 MW/（cm2sr），电光效率为43.0%。设计和实验共同表明，该光纤耦合模块可实现500 W稳定功率输出，可广泛应用在光纤/固体激光泵浦及工业加工等领域。

Design of 500 W-output fiber-coupled diode laser module

In order to realize the output of high power semiconductor laser with uniform brightness, symmetrical shape and high symmetrical beam quality, a high power fiber-coupled diode laser system based on mini-bar was proposed, and Zemax was used to simulate a 500 W-output fiber-coupled diode laser system with a fiber of 200 m core diameter and 0.22 numerical aperture. In the system, mirror-stripe mirror system was put forward to compress the beam size in the fast axis of diode array in terrace structure, and polarization multiplexing was used to double the output power without changing the beam parameter product. Then, a beam expander system was taken to reduce the residual angle in slow axis, and an aspherical lens was used to coupled the shaping beam into the fiber. Based on the existing condition, 4 diode laser arrays (each contains 5 mini-bar) in terrace structure were used to validate the design. The output power of the fiber-coupled diode laser system can achieve 506 W, and the brightness is 10.3 MW/(cm2sr), while the E-O efficiency is 43.0% at operation current of 37 A. Design and experiment all show the fiber-coupled diode laser system can work steadily with output power over 500 W. This module can be used in material processing and many other areas.