多参量一体化光纤传感器及标校系统的研制与开发

提出一种集温度、压力和流量多参数同时测量的新型光纤传感器，并对其原理和结构、工艺设计展开研究工作。采用靶式与悬臂梁结构相结合的机敏结构、薄壁压力应变筒结构等集成在同一传感器探头上，并利用四只光纤光栅使得温度、压力和流量三个参数得以同时检测。利用光纤光栅两两之间波长移动量相差或相和，使温度与流量、压力交叉敏感问题得以解决。同时开发了光纤传感器标校系统，这一系统可以较准确实现对所研发的多参量一体化传感器的测试结果进行检测和标校。

Research and development of a multi-parameter integrated optical fiber sensor and calibration system

A new type optical fiber sensor which realized the simultaneous measurement of temperature, pressure and flow rate was proposed, and some research work on its principle, structure and process design was carried. The flow rate sensitization structure combined by target and cantilever, thin-walled cylinder pressure structure were integrated on a sensing probe, 4 fiber Bragg gratings (FBG) were adopted to measure the temperature, pressure and flow rate simultaneous. By making addition or difference between two pairs of FBG resonance wavelength shift, the cross sensitivity between temperature and flow rate, pressure was solved. Meanwhile, the calibration system was developed, this system can achieve relatively accurate calibration and measurement of the proposed multi-parameter sensor.