HeNe激光双折射外腔回馈位移测量仪研究

基于单模激光器的双折射外腔回馈位移测量系统能输出两路回馈条纹信号，且条纹相位差不受回馈外腔长的影响，因此在研制大量程、高分辨位移测量系统方面极具潜力。开展了双折射外腔回馈的相关现象研究，研制了性能优良的位移测量仪器。稳频和回馈外腔扫描技术相结合，进一步提高了系统的频率稳定度（优于10-7）和抗干扰性能力。试验对系统进行了零漂、拍频和比对测试，其量程超过200 mm，分辨率为15.82 nm，线性度优于2.310-7。分析了系统的主要误差来源，估算了总的测量误差为0.21 m。回馈位移测量仪具有结构简单、分辨率高、线性度好以及测量范围大的优点，工业应用前景广阔。

Research on displacement measurement in HeNe laser with birefringent external cavity feedback

The displacement measurement based on single mode in HeNe laser with the birefringence optical feedback can output two feedback signals. The fringe phase difference is not affected by the feedback external cavity length, so it has great potential in the development of large range and high resolution displacement measurement system. Phenomenon of birefringence optical feedback was researched and displacement measurement system of high-performance was developed. The frequency stability and anti-jamming capability of the displacement measurement system were improved by combining the frequency stabilization technique and feedback cavity scanning technique. The stabilized frequency fluctuation was less than 10-7. The zero drift, beat frequency and comparison of the system were tested. Its range was more than 200 mm, the resolution is 15.82 nm, the linearity is better than 2.310-7. The main error sources of the system were analyzed, and the total measurement error was 0.21 m. The displacement sensor features compact configuration, nanometer-scale resolution, good linearity and large measurement range, and has broad application prospects in industry.